Granted Patent
Utility
US 6,756,559 · App. 10/028,301
Plasma etching apparatus
Inventor:
Poong-Boo Seo
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Dec 28, 2001
Inventor
Poong-Boo Seo
Assignee (at issue)
LG Philips LCD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.