Granted Patent
Utility
US 6,756,635 · App. 10/166,189
Semiconductor substrate including multiple nitrided gate insulating films
Inventors:
Yuri Yasuda, Naohiko Kimizuka
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Jun 10, 2002
Inventors
Yuri Yasuda
Naohiko Kimizuka
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.