Granted Patent
Utility
US 6,757,316 · App. 09/854,097
Four KHz gas discharge laser
Inventors:
Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns, Robert B. Saethre, Vladimir B. Fleurov, Richard M. Ness, Curtis Rettig, Robert A. Shannon, Richard C. Ujazdowski, Shahryar Rokni, Xiaojiang Pan, Vladimir Kulgeyko, Scott T. Smith, Stuart L. Anderson, John M. Algots, Ronald Spangler, Igor V. Fomenkov
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: May 11, 2001
Inventors
Peter Clarke Newman
Thomas Patrick Duffey
William N. Partlo
Richard L. Sandstrom
Paul C. Melcher
David M. Johns
Robert B. Saethre
Vladimir B. Fleurov
Richard M. Ness
Curtis Rettig
Robert A. Shannon
Richard C. Ujazdowski
Shahryar Rokni
Xiaojiang Pan
Vladimir Kulgeyko
Scott T. Smith
Stuart L. Anderson
John M. Algots
Ronald Spangler
Igor V. Fomenkov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.