Granted Patent
Utility
US 6,758,224 · App. 10/043,190
Method of cleaning CVD device
Inventor:
Hiroshi Nogami
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Jan 14, 2002
Inventor
Hiroshi Nogami
Assignee (at issue)
Anelva Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.