IP Library Granted Patent US 6,758,983
Granted Patent Utility
US 6,758,983 · App. 10/076,296

Staggered torsional electrostatic combdrive and method of forming same

Inventors: Robert Conant, Jocelyn Nee, Kam-Yin Lau, Richard S. Muller
Patented Case View Patent ↗
Granted: Jul 6, 2004 Filed: Feb 13, 2002
Inventors
Robert Conant
Jocelyn Nee
Kam-Yin Lau
Richard S. Muller
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

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Quick Facts
Patent No.
US 6,758,983
App. No.
10/076,296
Filed
2002-02-13
Granted
2004-07-06
Kind
B2