Granted Patent
Utility
US 6,759,184 · App. 10/186,139
Amplification of resist structures of fluorinated resist polymers by structural growth of the structures by targeted chemical bonding of fluorinated oligomers
Inventors:
Jörg Rottstegge, Christian Eschbaumer, Christoph Hohle, Waltraud Herbst, Michael Sebald
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Jun 28, 2002
Inventors
Jörg Rottstegge
Christian Eschbaumer
Christoph Hohle
Waltraud Herbst
Michael Sebald
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.