Granted Patent
Utility
US 6,764,546 · App. 10/317,275
Apparatus and method for growth of a thin film
Inventor:
Ivo Raaijmakers
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Dec 10, 2002
Inventor
Ivo Raaijmakers
Assignee (at issue)
ASM International N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.