Granted Patent
Utility
US 6,768,765 · App. 10/163,098
High power excimer or molecular fluorine laser system
Inventors:
Thomas Schroeder, Rustem Osmanow, Juergen Baumler
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Jun 4, 2002
Inventors
Thomas Schroeder
Rustem Osmanow
Juergen Baumler
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.