Granted Patent
Utility
US 6,769,960 · App. 10/309,119
System for manufacturing a semiconductor device, polishing slurry feeder and method for manufacturing a semiconductor device
Inventor:
Katsuhisa Sakai
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Dec 4, 2002
Inventor
Katsuhisa Sakai
Assignee (at issue)
Renesas Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.