Granted Patent
Utility
US 6,770,889 · App. 10/370,608
Method of controlling electrostatic lens and ion implantation apparatus
Inventor:
Koji Iwasawa
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Feb 24, 2003
Inventor
Koji Iwasawa
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.