Granted Patent
Utility
US 6,773,854 · App. 10/210,011
Method of producing a perforated mask for particle radiation
Inventors:
Albrecht Ehrmann, Ernst Haugeneder, Frank-Michael Kamm, Alexander Petraschenko, Stefan Schunck
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Jul 31, 2002
Inventors
Albrecht Ehrmann
Ernst Haugeneder
Frank-Michael Kamm
Alexander Petraschenko
Stefan Schunck
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.