IP Library › Granted Patent US 6,774,984
Granted Patent Utility
US 6,774,984 · App. 10/145,138

Optical imaging system with polarizer and a crystalline-quartz plate for use therewith

Inventor: Michael Gerhard
Patented Case View Patent ↗
Granted: Aug 10, 2004 Filed: May 15, 2002
Inventor
Michael Gerhard
Assignee (at issue)
Carl Zeiss Semiconductor Manufacturing Technologies AG

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Quick Facts
Patent No.
US 6,774,984
App. No.
10/145,138
Filed
2002-05-15
Granted
2004-08-10
Kind
B2