Granted Patent
Utility
US 6,775,069 · App. 10/270,556
Advanced illumination system for use in microlithography
Inventors:
Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes, Peter Baumgartner, Walter Augustyn
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Oct 16, 2002
Inventors
Mark Oskotsky
Lev Ryzhikov
Scott Coston
James Tsacoyeanes
Peter Baumgartner
Walter Augustyn
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.