Granted Patent
Utility
US 6,777,353 · App. 10/410,718
Process for producing oxide thin films
Inventor:
Matti Putkonen
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Apr 8, 2003
Inventor
Matti Putkonen
Assignee (at issue)
ASM Microchemistry Oy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.