Granted Patent
Utility
US 6,777,687 · App. 10/153,114
Substrate positioning system
Inventors:
John W. Vanderpot, Donald W. Berrian, John D. Pollock
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: May 21, 2002
Inventors
John W. Vanderpot
Donald W. Berrian
John D. Pollock
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.