Granted Patent
Utility
US 6,777,972 · App. 10/127,381
Method and apparatus for detecting breakdown in ultra thin dielectric layers
Inventors:
Philippe Roussel, Robin Degraeve, Geert Van den Bosch
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Apr 22, 2002
Inventors
Philippe Roussel
Robin Degraeve
Geert Van den Bosch
Assignee (at issue)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.