Granted Patent
Utility
US 6,778,306 · App. 10/429,546
Surface micromachined optical system with reinforced mirror microstructure
Inventors:
Jeffry J. Sniegowski, M. Steven Rodgers
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: May 5, 2003
Inventors
Jeffry J. Sniegowski
M. Steven Rodgers
Assignee (at issue)
MEMX, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.