Granted Patent
Utility
US 6,778,584 · App. 09/716,041
High power gas discharge laser with helium purged line narrowing unit
Inventors:
William N. Partlo, Richard L. Sandstrom, Raymond F. Cybulski, Igor V. Fomenkov, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Nov 17, 2000
Inventors
William N. Partlo
Richard L. Sandstrom
Raymond F. Cybulski
Igor V. Fomenkov
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.