Granted Patent
Utility
US 6,778,716 · App. 10/368,794
Method and apparatus for MEMS optical sensing using micromirrors
Inventors:
Rick C. Stevens, Kevin J. Thorson
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Feb 19, 2003
Inventors
Rick C. Stevens
Kevin J. Thorson
Assignee (at issue)
LOCKHEED MARTIN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.