Granted Patent
Utility
US 6,781,135 · App. 10/301,080
Universal EUV in-band intensity detector
Inventor:
Kurt Berger
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Nov 21, 2002
Inventor
Kurt Berger
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.