Granted Patent
Utility
US 6,781,205 · App. 10/269,426
Electrostatic charge measurement on semiconductor wafers
Inventors:
Lawrence Levit, Alexander Ignatenko
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Oct 11, 2002
Inventors
Lawrence Levit
Alexander Ignatenko
Assignee (at issue)
Ion Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.