Granted Patent
Utility
US 6,781,317 · App. 10/373,163
Methods and apparatus for calibration and metrology for an integrated RF generator system
Inventor:
Daniel Goodman
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Feb 24, 2003
Inventor
Daniel Goodman
Assignee (at issue)
Applied Science & Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.