Granted Patent
Utility
US 6,783,590 · App. 09/835,931
Method of growing a thin film onto a substrate
Inventors:
Sven Lindfors, Pekka Soininen
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Apr 16, 2001
Inventors
Sven Lindfors
Pekka Soininen
Assignee (at issue)
ASM International N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.