Granted Patent
Utility
US 6,783,643 · App. 10/186,105
Control of solid state dimensional features
Inventors:
Jene A. Golovchenko, Daniel Branton, Michael J. Aziz, Jiali Li, Derek M. Stein, Ciaran J. McMullan
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Jun 27, 2002
Inventors
Jene A. Golovchenko
Daniel Branton
Michael J. Aziz
Jiali Li
Derek M. Stein
Ciaran J. McMullan
Assignee (at issue)
President and Fellows of Harvard College
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.