Granted Patent
Utility
US 6,783,921 · App. 10/059,107
Method for etching laminated assembly including polyimide layer
Inventors:
Shingo Kaimori, Tsuyoshi Nonaka, Satoshi Koshimuta, Masato Tsurugasaki
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Jan 31, 2002
Inventors
Shingo Kaimori
Tsuyoshi Nonaka
Satoshi Koshimuta
Masato Tsurugasaki
Assignees (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
Fuchigami Micro Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.