Granted Patent
Utility
US 6,784,442 · App. 10/329,388
Exposure apparatus, control method thereof, and device manufacturing method
Inventors:
Masato Muraki, Hiroya Ohta, Shin Hashimoto
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Dec 27, 2002
Inventors
Masato Muraki
Hiroya Ohta
Shin Hashimoto
Assignee (at issue)
CANON KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.