IP Library › Granted Patent US 6,787,003
Granted Patent Utility
US 6,787,003 · App. 10/148,464

Sputtering target and methods of making and using same

Inventors: Klaus Hartig, Johan Vanderstraeten
Patented Case View Patent ↗
Granted: Sep 7, 2004 Filed: May 31, 2002
Inventors
Klaus Hartig
Johan Vanderstraeten
Assignee (at issue)
N V BEKAERT SA

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Quick Facts
Patent No.
US 6,787,003
App. No.
10/148,464
Filed
2002-05-31
Granted
2004-09-07
Kind
B2