Granted Patent
Utility
US 6,788,400 · App. 10/001,196
Method and apparatus for detecting aberrations in an optical system
Inventor:
J. Fung Chen
Patented Case
View Patent ↗
Granted: Sep 7, 2004
Filed: Dec 4, 2001
Inventor
J. Fung Chen
Assignee (at issue)
ASML Masktools B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.