Granted Patent
Utility
US 6,790,130 · App. 10/600,907
Semiconductor processing methods of removing conductive material
Inventors:
Trung T. Doan, Scott Meikle
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Jun 20, 2003
Inventors
Trung T. Doan
Scott Meikle
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.