Granted Patent
Utility
US 6,790,322 · App. 10/149,753
Production of material libraries using sputter methods
Inventors:
Stephan Schunk, Dirk Demuth, Hartmut Hibst
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Nov 13, 2002
Inventors
Stephan Schunk
Dirk Demuth
Hartmut Hibst
Assignee (at issue)
HTE GMBH THE HIGH THROUGHPUT EXPERIMENTATION COMPANY
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.