Granted Patent
Utility
US 6,791,274 · App. 10/620,129
RF power control device for RF plasma applications
Inventors:
Frederick W. Hauer, Imran Ahmed Bhutta, Ronald Anthony Decker, Joseph Osselburn, Theresa Beizer, Anton Mavretic
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Jul 15, 2003
Inventors
Frederick W. Hauer
Imran Ahmed Bhutta
Ronald Anthony Decker
Joseph Osselburn
Theresa Beizer
Anton Mavretic
Assignee (at issue)
Advanced Energy Industries, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.