Granted Patent
Utility
US 6,792,591 · App. 10/083,683
Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
Inventors:
Xuelong Shi, Jang Fung Chen, Duan-Fu Stephen Hsu
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Feb 27, 2002
Inventors
Xuelong Shi
Jang Fung Chen
Duan-Fu Stephen Hsu
Assignee (at issue)
ASML Masktools B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.