Granted Patent
Utility
US 6,794,312 · App. 10/193,730
Layering nitrided oxide on a silicon substrate
Inventors:
Ayad Abdul-Hak, Thomas Gaertner, Joerg Schulze
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Jul 11, 2002
Inventors
Ayad Abdul-Hak
Thomas Gaertner
Joerg Schulze
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.