Granted Patent
Utility
US 6,794,605 · App. 10/110,800
Method for fabricating chemical mechanical polshing pad using laser
Inventors:
Inha Park, Tae-Kyoung Kwon, Jaeseok Kim, In-Ju Hwang
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Dec 2, 2002
Inventors
Inha Park
Tae-Kyoung Kwon
Jaeseok Kim
In-Ju Hwang
Assignee (at issue)
SKC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.