Granted Patent
Utility
US 6,795,456 · App. 09/733,874
157 nm laser system and method for multi-layer semiconductor failure analysis
Inventor:
Michael J. Scaggs
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Dec 8, 2000
Inventor
Michael J. Scaggs
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.