Granted Patent
Utility
US 6,795,473 · App. 09/602,184
Narrow band excimer laser with a prism-grating as line-narrowing optical element
Inventors:
Juergen Kleinschmidt, Thomas Schroeder
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Jun 22, 2000
Inventors
Juergen Kleinschmidt
Thomas Schroeder
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.