Granted Patent
Utility
US 6,797,343 · App. 10/028,198
Dielectric thin films from fluorinated precursors
Inventor:
Chung J. Lee
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Dec 20, 2001
Inventor
Chung J. Lee
Assignee (at issue)
DELECTRIK SYSTEMS PRIVATE LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.