Granted Patent
Utility
US 6,798,498 · App. 10/050,542
Apparatus for evaluating polysilicon film
Inventors:
Hiroyuki Wada, Koichi Tatsuki, Nobuhiko Umezu, Eiji Isomura, Tetsuo Abe, Tadashi Hattori, Akifumi Ooshima, Makoto Uragaki, Yoshiyuki Noguchi, Hiroyuki Tamaki, Masataka Ebe, Tomohiro Ishiguro, Yasuyuki Kato
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Jan 18, 2002
Inventors
Hiroyuki Wada
Koichi Tatsuki
Nobuhiko Umezu
Eiji Isomura
Tetsuo Abe
Tadashi Hattori
Akifumi Ooshima
Makoto Uragaki
Yoshiyuki Noguchi
Hiroyuki Tamaki
Masataka Ebe
Tomohiro Ishiguro
Yasuyuki Kato
Assignees (at issue)
SONY GROUP CORPORATION
Sony Precision Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.