Granted Patent
Utility
US 6,800,212 · App. 10/146,278
Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection
Inventors:
Jeffrey Peterson, Charles E. Hunt
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: May 15, 2002
Inventors
Jeffrey Peterson
Charles E. Hunt
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.