Granted Patent
Utility
US 6,800,862 · App. 10/314,117
Ion implanting apparatus and ion implanting method
Inventors:
Takao Matsumoto, Kohichi Orihira, Kazuhiro Nakao, Mitsunori Nakamura
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Dec 9, 2002
Inventors
Takao Matsumoto
Kohichi Orihira
Kazuhiro Nakao
Mitsunori Nakamura
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.