Granted Patent
Utility
US 6,803,170 · App. 09/925,679
Resist composition and method for manufacturing semiconductor device using the resist composition
Inventors:
Minoru Toriumi, Isao Satou, Hiroyuki Watanabe, Shunji Katai, Shintaro Suzuki
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Aug 10, 2001
Inventors
Minoru Toriumi
Isao Satou
Hiroyuki Watanabe
Shunji Katai
Shintaro Suzuki
Assignees (at issue)
Semiconductor Leading Edge Technologies, Inc.
Idemitsu Petrochemical Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.