Granted Patent
Utility
US 6,806,206 · App. 10/197,259
Etching method and etching liquid
Inventors:
Masaki Munakata, Hirohito Komatsu, Satoshi Kumon, Kazuma Teramoto, Nobuhiro Goda, Masakazu Motoi, Noriyuki Saitou, Toshiaki Sakakihara, Makoto Ishikawa
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: Jul 18, 2002
Inventors
Masaki Munakata
Hirohito Komatsu
Satoshi Kumon
Kazuma Teramoto
Nobuhiro Goda
Masakazu Motoi
Noriyuki Saitou
Toshiaki Sakakihara
Makoto Ishikawa
Assignees (at issue)
SONY GROUP CORPORATION
St Liquid Crystal Display Corporation
MITSUBISHI CHEMICAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.