Granted Patent
Utility
US 6,806,992 · App. 10/331,500
Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer
Inventors:
Hiromitsu Soneda, Satoshi Ueda, Hisao Okuda, Ippei Sawaki, Osamu Tsuboi, Yoshihiro Mizuno, Norinao Kouma, Yoshitaka Nakamura, Fumio Yamagishi
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: Dec 31, 2002
Inventors
Hiromitsu Soneda
Satoshi Ueda
Hisao Okuda
Ippei Sawaki
Osamu Tsuboi
Yoshihiro Mizuno
Norinao Kouma
Yoshitaka Nakamura
Fumio Yamagishi
Assignees (at issue)
Fujitsu Limited
FUJITSU MEDIA DEVICES LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.