Granted Patent
Utility
US 6,807,454 · App. 10/249,103
Method for automatically controlling defect -specification in a semiconductor manufacturing process
Inventors:
Sheng-Jen Wang, Long-Hui Lin
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: Mar 17, 2003
Inventors
Sheng-Jen Wang
Long-Hui Lin
Assignee (at issue)
POWERCHIP SEMICONDUCTOR CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.