Granted Patent
Utility
US 6,809,448 · App. 10/258,542
Excimer laser apparatus
Inventors:
Natsushi Suzuki, Hisashi Nara, Shunsuke Yoshioka, Toshimitsu Barada, Atsushi Ooyama, Toshiharu Nakazawa, Shinichi Sekiguchi, Hiroyuki Shinozaki
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Oct 25, 2002
Inventors
Natsushi Suzuki
Hisashi Nara
Shunsuke Yoshioka
Toshimitsu Barada
Atsushi Ooyama
Toshiharu Nakazawa
Shinichi Sekiguchi
Hiroyuki Shinozaki
Assignees (at issue)
EBARA CORPORATION
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.