IP Library › Granted Patent US 6,809,827
Granted Patent Utility
US 6,809,827 · App. 10/670,028

Self referencing mark independent alignment sensor

Inventor: Justin Kreuzer
Patented Case View Patent ↗
Granted: Oct 26, 2004 Filed: Sep 25, 2003
Inventor
Justin Kreuzer
Assignee (at issue)
ASML Holding N.V.

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Quick Facts
Patent No.
US 6,809,827
App. No.
10/670,028
Filed
2003-09-25
Granted
2004-10-26
Kind
B2