IP Library › Granted Patent US 6,809,890
Granted Patent Utility
US 6,809,890 · App. 10/158,166

Method for manufacturing silicon wafer and silicon wafer

Inventors: Satoshi Do, Isao Onuma
Patented Case View Patent ↗
Granted: Oct 26, 2004 Filed: May 31, 2002
Inventors
Satoshi Do
Isao Onuma
Assignee (at issue)
Milestone Co., Ltd.

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Quick Facts
Patent No.
US 6,809,890
App. No.
10/158,166
Filed
2002-05-31
Granted
2004-10-26
Kind
B2