Granted Patent
Utility
US 6,810,887 · App. 09/927,263
Method for cleaning semiconductor fabrication equipment parts
Inventor:
Samantha Tan
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Aug 10, 2001
Inventor
Samantha Tan
Assignee (at issue)
Chemtrace Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.