Granted Patent
Utility
US 6,811,831 · App. 10/300,137
Method for depositing silicon nitride
Inventors:
William C. Koutny, Helen L. Chung
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Nov 20, 2002
Inventors
William C. Koutny
Helen L. Chung
Assignee (at issue)
Silicon Magnetic Systems
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.