IP Library › Granted Patent US 6,812,162
Granted Patent Utility
US 6,812,162 · App. 10/255,015

Rapid deposition of borosilicate glass films

Inventors: Shrinivas Govindarajan, Mukund Patel
Patented Case View Patent ↗
Granted: Nov 2, 2004 Filed: Sep 25, 2002
Inventors
Shrinivas Govindarajan
Mukund Patel
Assignee (at issue)
Infineon Technologies Richmond, LP

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Quick Facts
Patent No.
US 6,812,162
App. No.
10/255,015
Filed
2002-09-25
Granted
2004-11-02
Kind
B2